Converter platform — Advanced Energy Industries Inc.
Advanced Energy extended its Luxtron FluorOptic Thermometry (FOT) family with a highly integrated converter platform that provides high-accuracy sensing in extremely low and high temperatures.
Ideal for plasma-enhanced semiconductor deposition and etch fabrication processes, the new Luxtron M-1100 operates from minus 200°C, the start of the cryogenic range, to “hot chuck” temperatures of 450°C with an accuracy of ± 0.1° and stability of ± 0.05°. The integration of five channels supports monitoring multiple probes from a single converter, while flexible communication outputs simplify digital monitoring, updates, and system integration.